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Books : Dopant incorporation efficiency in CVD silicon carbide epilayers (SuDoc NAS 1.15:112756)


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by: D. J. Larkin







Binding: Unknown Binding
Label: National Aeronautics and Space Administration National Technical Information Service, distributor
Manufacturer: National Aeronautics and Space Administration National Technical Information Service, distributor
Publication Date: 1996
Publisher: National Aeronautics and Space Administration National Technical Information Service, distributor
Studio: National Aeronautics and Space Administration National Technical Information Service, distributor
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